European Patent Office

T 1098/02 (Wafer polishing/SHIN-ETSU) of 15.10.2004

European Case Law Identifier
ECLI:EP:BA:2004:T109802.20041015
Date of decision
15 October 2004
Case number
T 1098/02
Online on
20 December 2004
Petition for review of
-
Application number
94303951.1
IPC class
H01L 21/306
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Method of making semiconductor wafers
Applicant name
SHIN-ETSU HANDOTAI COMPANY LIMITED
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Inventive step - auxiliary request (yes)
Claimed upper limit - not an arbitrary limit
Catchword
-
Cited cases
-
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the first instance with the order to grant a patent with the following documents:

Claims:

Nos. 1 to 4 of the auxiliary request filed during the oral proceedings

Description:

pages 1 to 7, 7a, 8 to 15 of the auxiliary request filed during the oral proceedings

Drawings:

Figures 1 to 7 as filed.