T 0540/08 of 05.07.2012
- European Case Law Identifier
- ECLI:EP:BA:2012:T054008.20120705
- Date of decision
- 5 July 2012
- Case number
- T 0540/08
- Online on
- 13 September 2012
- Petition for review of
- -
- Application number
- 01922058.1
- IPC class
- H01L 21/66
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Semiconductor device inspection system
- Applicant name
- Tokyo Electron Limited
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 56 1973
- Keywords
- Inventive step (no)
- Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
The appeal is dismissed.