T 0599/08 of 13.09.2012
- European Case Law Identifier
- ECLI:EP:BA:2012:T059908.20120913
- Date of decision
- 13 September 2012
- Case number
- T 0599/08
- Online on
- 25 September 2012
- Petition for review of
- -
- Application number
- 01902094.0
- IPC class
- H01L 21/66
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Method and apparatus for control of critical dimension using feedback etch control
- Applicant name
- ADVANCED MICRO DEVICES, INC.
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 113(1)European Patent Convention Art 123(2)Rules of procedure of the Boards of Appeal Art 13(1)Rules of procedure of the Boards of Appeal Art 15(3)European Patent Convention Art 56 1973European Patent Convention Art 83 1973European Patent Convention Art 84 1973
- Keywords
- Added subject-matter (yes)
Inventive step (no) - Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
The appeal is dismissed.