European Patent Office

T 0797/95 of 22.06.2000

European Case Law Identifier
ECLI:EP:BA:2000:T079795.20000622
Date of decision
22 June 2000
Case number
T 0797/95
Online on
12 July 2000
Petition for review of
-
Application number
90304043.4
IPC class
C23C 14/35
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Method and apparatus for sputter coating stepped wafers - case B
Applicant name
Tokyo Electron Limited
Opponent name
-
Board
3.4.01
Headnote
-
Keywords
Inventive step (yes)
Catchword
-
Cited cases
-
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside,

2. The case is remitted to the department of first instance with the order to grant a patent on the basis of the following documents:

Claims: No. 1 to 18 as filed with the letter dated 21 December 1999;

Description: pages 7, 7a, 11, 12, 17, 31 as filed with the letter dated 21 December 1999,

pages 1 to 6, 8 to 10, 13 to 16, 18 to 30 and 32 to 60 as originally filed;

Drawings: Sheets 1/7 to 7/7 as originally filed.