European Patent Office

T 0949/97 (Sputtering deposition/APPLIED MATERIALS) of 04.05.2000

European Case Law Identifier
ECLI:EP:BA:2000:T094997.20000504
Date of decision
4 May 2000
Case number
T 0949/97
Online on
21 July 2000
Petition for review of
-
Application number
92112768.4
IPC class
H01L 21/90
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Metallic material deposition method for integrated circuit manufacturing
Applicant name
APPLIED MATERIALS, INC.
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Inventive step - yes (third auxiliary request)
Catchword
-
Cited cases
-
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the first instance with the order to grant a patent on the basis of the appellant's third auxiliary request as follows:

Claims: Claims 1 to 9 as filed during the oral proceedings

Description: Pages 1 to 13 as filed during the oral proceedings

Drawings: Sheet 1/1 as filed on 16 October 1992.