European Patent Office

T 0093/05 of 30.06.2006

European Case Law Identifier
ECLI:EP:BA:2006:T009305.20060630
Date of decision
30 June 2006
Case number
T 0093/05
Online on
2 August 2006
Petition for review of
-
Application number
99112835.6
IPC class
H01J 37/02
Language of proceedings
English
Distribution
No distribution (D)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Apparatus and method for examining specimen with a charged particle beam
Applicant name
ICT Integrated Circuit Testing
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Main, first to third auxiliary requests: inventive step (no)
Fourth auxiliary requests: sufficiency of disclosure (no)
Catchword
-
Cited cases
-
Citing cases
-

ORDER

For these reasons it is decided that:

The appeal is dismissed.