T 1542/07 of 21.06.2010
- European Case Law Identifier
- ECLI:EP:BA:2010:T154207.20100621
- Date of decision
- 21 June 2010
- Case number
- T 1542/07
- Online on
- 25 June 2010
- Petition for review of
- -
- Application number
- 00991365.8
- IPC class
- H01L 21/00
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Method and apparatus for the treatment of substrates
- Applicant name
- ASM INTERNATIONAL N.V.
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 56 1973
- Keywords
- Inventive step (yes)
- Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the department of the first instance with the order to grant a patent in the following version:
Claims: Claims 1 to 9 filed as main request with letter dated 24 August 2007;
Description: Pages 2, 4 and 5 as published;
Pages 1 and 3 as filed with letter of 2 May 2006;
Drawings: Sheets 1/3 to 3/3 as published.