T 1654/07 of 27.09.2012
- European Case Law Identifier
- ECLI:EP:BA:2012:T165407.20120927
- Date of decision
- 27 September 2012
- Case number
- T 1654/07
- Online on
- 30 October 2012
- Petition for review of
- -
- Application number
- 01121029.1
- IPC class
- H01L 21/00
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Substrate processing apparatus and substrate inspection method
- Applicant name
- Dainippon Screen Mfg. Co., Ltd.
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 123(2)European Patent Convention Art 54 1973European Patent Convention Art 56 1973European Patent Convention Art 84 1973
- Keywords
- Novelty (yes)
Inventive step (yes) - Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the department of first instance with the order to grant a patent in the following version:
- claims 1 and 2, filed at the oral proceeding,
- description: page 1, filed at the oral proceedings, pages 2 and 3 filed with letter of 21 August 2012, pages 5 to 28 as originally filed,
page 29 filed with letter of 21 August 2012 (page 4 deleted),
- drawings 1 to 8 as originally filed.