European Patent Office

T 1654/07 of 27.09.2012

European Case Law Identifier
ECLI:EP:BA:2012:T165407.20120927
Date of decision
27 September 2012
Case number
T 1654/07
Online on
30 October 2012
Petition for review of
-
Application number
01121029.1
IPC class
H01L 21/00
Language of proceedings
English
Distribution
No distribution (D)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Substrate processing apparatus and substrate inspection method
Applicant name
Dainippon Screen Mfg. Co., Ltd.
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Novelty (yes)
Inventive step (yes)
Catchword
-
Cited cases
-
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the department of first instance with the order to grant a patent in the following version:

- claims 1 and 2, filed at the oral proceeding,

- description: page 1, filed at the oral proceedings, pages 2 and 3 filed with letter of 21 August 2012, pages 5 to 28 as originally filed,

page 29 filed with letter of 21 August 2012 (page 4 deleted),

- drawings 1 to 8 as originally filed.