European Patent Office

T 0566/00 of 27.11.2002

European Case Law Identifier
ECLI:EP:BA:2002:T056600.20021127
Date of decision
27 November 2002
Case number
T 0566/00
Online on
20 March 2003
Petition for review of
-
Application number
91307625.3
IPC class
H01L 21/00
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
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Abstracts for this decision
-
Application title
Vacuum processing apparatus and cleaning method therefor
Applicant name
Hitachi, Ltd.
Opponent name
Institute of Technological Information, Inc.
Board
3.4.03
Headnote
-
Keywords
Inventive step (yes - after amendments)
Catchword
-
Cited cases
-
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the department of first instance with the order to maintain the patent with the following documents:

Claims: Nos. 1 to 5, filed as auxiliary request II on 25 October 2002;

Description: columns 1 to 7, filed during the oral proceedings; and

Drawings: Figures 1 and 2, as granted.