T 0874/02 (Fluorine-doped silicon oxide layer/APPLIED MATERIALS) of 30.09.2004
- European Case Law Identifier
- ECLI:EP:BA:2004:T087402.20040930
- Date of decision
- 30 September 2004
- Case number
- T 0874/02
- Petition for review of
- -
- Application number
- 98107039.4
- IPC class
- H01L 21/316
- Language of proceedings
- English
- Distribution
- Distributed to board chairmen (C)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Process for depositing a Halogen-doped SiO2 layer
- Applicant name
- APPLIED MATERIALS, INC.
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 52(2)(c) 1973European Patent Convention Art 56 1973
- Keywords
- Inventive step (yes) - after amendments
- Catchword
- -
- Cited cases
- T 1173/97
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the department of the first instance with the order to grant a patent on the basis of the following documents:
Claims 1 to 14 as filed with the letter dated 16. September 2004;
Description pages 1 to 22 filed with the statement of the grounds of appeal;
Drawings Sheets 1/21 to 21/21 as originally filed