T 0391/03 of 15.07.2005
- European Case Law Identifier
- ECLI:EP:BA:2005:T039103.20050715
- Date of decision
- 15 July 2005
- Case number
- T 0391/03
- Petition for review of
- -
- Application number
- 97303962.1
- IPC class
- H01J 37/32
- Language of proceedings
- English
- Distribution
- Distributed to board chairmen (C)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- RF plasma processors
- Applicant name
- LAM RESEARCH CORPORATION
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 56 1973European Patent Convention Art 84 1973
- Keywords
- No substantive response from appellant applicant
Oral proceedings not attended
Grounds in Board's communication maintained
Appeal dismissed - Catchword
- -
- Cited cases
- T 0230/99
- Citing cases
- -
ORDER
For these reasons it is decided that:
The appeal is dismissed.