European Patent Office

T 0509/03 (Plasma etching/Texas Instruments) of 06.04.2005

European Case Law Identifier
ECLI:EP:BA:2005:T050903.20050406
Date of decision
6 April 2005
Case number
T 0509/03
Online on
19 April 2005
Petition for review of
-
Application number
97308454.4
IPC class
H01L 21/321
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
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Abstracts for this decision
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Application title
Plasma etching of a metal layer comprising copper
Applicant name
Texas Instruments Incorporated
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Inventive step (no)
Catchword
-
Cited cases
-
Citing cases
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ORDER

For these reasons it is decided that:

The appeal is dismissed.