T 0509/03 (Plasma etching/Texas Instruments) of 06.04.2005
- European Case Law Identifier
- ECLI:EP:BA:2005:T050903.20050406
- Date of decision
- 6 April 2005
- Case number
- T 0509/03
- Online on
- 19 April 2005
- Petition for review of
- -
- Application number
- 97308454.4
- IPC class
- H01L 21/321
- Language of proceedings
- English
- Distribution
- Distributed to board chairmen (C)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Plasma etching of a metal layer comprising copper
- Applicant name
- Texas Instruments Incorporated
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 56 1973
- Keywords
- Inventive step (no)
- Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
The appeal is dismissed.