T 0761/03 of 06.12.2004
- European Case Law Identifier
- ECLI:EP:BA:2004:T076103.20041206
- Date of decision
- 6 December 2004
- Case number
- T 0761/03
- Online on
- 21 January 2005
- Petition for review of
- -
- Application number
- 98931533.8
- IPC class
- H01L 21/3213
- Language of proceedings
- English
- Distribution
- Distributed to board chairmen (C)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Plasma reactor for passivating a substrate
- Applicant name
- LAM RESEARCH CORPORATION
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 54 1973European Patent Convention Art 56 1973
- Keywords
- Novelty: yes (after amendments)
Inventive step: yes - Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the first instance with the order to grant a patent in the following version:
Claims: 1 to 7
Description: pages 1 to 3, 3a, 4 to 9, 9a and 10 to 15, both filed in the oral proceedings
Drawings: figures 1 to 6, as originally filed.