T 0564/05 of 09.01.2008
- European Case Law Identifier
- ECLI:EP:BA:2008:T056405.20080109
- Date of decision
- 9 January 2008
- Case number
- T 0564/05
- Petition for review of
- -
- Application number
- 96936061.9
- IPC class
- H01L 21/68
- Language of proceedings
- English
- Distribution
- Distributed to board chairmen (C)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors
- Applicant name
- LAM RESEARCH CORPORATION
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 52(1)European Patent Convention Art 52(1) 1973European Patent Convention Art 56European Patent Convention Art 56 1973
- Keywords
- Inventive step (no)
Remittal to examining division (no) - Catchword
- See reasons 3 and 4
- Cited cases
- G 0010/93
- Citing cases
- -
ORDER
For these reasons it is decided that:
The appeal is dismissed.