T 0566/05 (Hhfac/SHARP) of 28.11.2006
- European Case Law Identifier
- ECLI:EP:BA:2006:T056605.20061128
- Date of decision
- 28 November 2006
- Case number
- T 0566/05
- Online on
- 22 December 2006
- Petition for review of
- -
- Application number
- 98304002.3
- IPC class
- H01L 21/321
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- System and method of selectively cleaning copper substrate surfaces, in-situ, to remove copper oxides
- Applicant name
- SHARP KABUSHIKI KAISHA, et al
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 56 1973
- Keywords
- Inventive step (no)
- Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
The appeal is dismissed.