European Patent Office

T 0901/05 of 31.01.2007

European Case Law Identifier
ECLI:EP:BA:2007:T090105.20070131
Date of decision
31 January 2007
Case number
T 0901/05
Online on
26 February 2007
Petition for review of
-
Application number
95304249.6
IPC class
H01L 21/027
Language of proceedings
English
Distribution
No distribution (D)
OJ versions
No OJ links found
Other decisions for this case
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Abstracts for this decision
-
Application title
Method of optical lithography using phase shift masking
Applicant name
ADVANCED MICRO DEVICES, INC.
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Inventive step (no)
Catchword
-
Cited cases
-
Citing cases
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ORDER

For these reasons it is decided that:

The appeal is dismissed.