European Patent Office

T 1646/06 of 03.03.2009

European Case Law Identifier
ECLI:EP:BA:2009:T164606.20090303
Date of decision
3 March 2009
Case number
T 1646/06
Online on
18 March 2009
Petition for review of
-
Application number
99106561.6
IPC class
H01L 21/00
Language of proceedings
English
Distribution
No distribution (D)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Semiconductor fabrication line with contamination preventing function
Applicant name
NEC Electronics Corporation
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Main request and first auxiliary request: Novelty (no)
Second auxiliary request: inventive step (no)
Catchword
-
Cited cases
-
Citing cases
-

ORDER

For these reasons it is decided that:

The appeal is dismissed.