European Patent Office

T 1688/06 of 02.03.2009

European Case Law Identifier
ECLI:EP:BA:2009:T168806.20090302
Date of decision
2 March 2009
Case number
T 1688/06
Petition for review of
-
Application number
02018326.5
IPC class
G03F 7/20
Language of proceedings
English
Distribution
No distribution (D)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Lithography information control system
Applicant name
NIKON CORPORATION
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
-
Catchword
-
Cited cases
G 0001/06
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the department of first instance for further prosecution.