T 0322/07 of 06.10.2009
- European Case Law Identifier
- ECLI:EP:BA:2009:T032207.20091006
- Date of decision
- 6 October 2009
- Case number
- T 0322/07
- Online on
- 13 October 2009
- Petition for review of
- -
- Application number
- 98960430.1
- IPC class
- H01L 21/311
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- High selectivity etching process for oxides
- Applicant name
- Micron Technology, Inc.
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 56 1973
- Keywords
- Inventive step (yes) - after amendment
- Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the department of the first instance with the order to grant a patent in the following version:
Claims: Claims 1 to 10 filed with letter dated 17 September 2009;
Description: Pages 1 and 5 to 9 as originally filed;
Page 2 filed with letter dated 7 September 2009;
Pages 3 and 4 filed with letter dated 17 September 2009;
Drawings: Sheets 1/3 to 3/3 as originally filed (and published).