T 1466/07 of 02.12.2010
- European Case Law Identifier
- ECLI:EP:BA:2010:T146607.20101202
- Date of decision
- 2 December 2010
- Case number
- T 1466/07
- Online on
- 14 March 2011
- Petition for review of
- -
- Application number
- 00926076.1
- IPC class
- H01L 21/66
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Method and apparatus for performing run-to-run control in a batch manufacturing environment
- Applicant name
- GlobalFoundries, Inc.
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 84 1973
- Keywords
- Lack of support by the description
- Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
The appeal is dismissed.