European Patent Office

T 0540/08 of 05.07.2012

European Case Law Identifier
ECLI:EP:BA:2012:T054008.20120705
Date of decision
5 July 2012
Case number
T 0540/08
Online on
13 September 2012
Petition for review of
-
Application number
01922058.1
IPC class
H01L 21/66
Language of proceedings
English
Distribution
No distribution (D)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Semiconductor device inspection system
Applicant name
Tokyo Electron Limited
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Inventive step (no)
Catchword
-
Cited cases
-
Citing cases
-

ORDER

For these reasons it is decided that:

The appeal is dismissed.