European Patent Office

T 2094/08 of 08.08.2012

European Case Law Identifier
ECLI:EP:BA:2012:T209408.20120808
Date of decision
8 August 2012
Case number
T 2094/08
Online on
22 August 2012
Petition for review of
-
Application number
01987139.1
Language of proceedings
English
Distribution
No distribution (D)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
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Application title
A SELF-CLEANING OPTIC FOR EXTREME ULTRAVIOLET LITHOGRAPHY
Applicant name
EUV Limited Liability Corporation
Opponent name
Carl Zeiss SMT GmbH
Board
3.4.02
Headnote
-
Keywords
Inventive Step - Claims 1 and 8 (yes)
Catchword
-
Cited cases
-
Citing cases
-

Order

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the first instance with

the order to maintain the patent on the basis of

the following documents:-

Description

to be adapted

Claims

1-13 filed with the letter dated 09 January 2009

Drawings

Figures 1,2,3a,3b of the patent specification.