European Patent Office

T 2018/10 of 24.01.2011

European Case Law Identifier
ECLI:EP:BA:2011:T201810.20110124
Date of decision
24 January 2011
Case number
T 2018/10
Online on
27 January 2011
Petition for review of
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Application number
02768252.5
IPC class
H01L 21/027
Language of proceedings
English
Distribution
No distribution (D)
OJ versions
No OJ links found
Other decisions for this case
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Abstracts for this decision
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Application title
Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece
Applicant name
Micronic Mydata AB
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Inadmissible appeal - missing statement of grounds
Catchword
-
Cited cases
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Citing cases
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ORDER

For these reasons it is decided that:

The appeal is rejected as inadmissible.