T 0029/94 (Bromine etch process/APPLIED MATERIALS) of 09.07.1998
- European Case Law Identifier
- ECLI:EP:BA:1998:T002994.19980709
- Date of decision
- 9 July 1998
- Case number
- T 0029/94
- Online on
- 29 July 1998
- Petition for review of
- -
- Application number
- 87311196.7
- IPC class
- H01L 21/306
- Language of proceedings
- English
- Distribution
- Distributed to board chairmen (C)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Bromine and iodine etch process for silicon and silicides
- Applicant name
- Applied Materials, Inc.
- Opponent name
- -
- Board
- 3.4.01
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 54 1973European Patent Convention Art 56 1973
- Keywords
- Novelty - yes (after amendments)
Inventive step - yes
Interpretation of a disclosure in the prior art - Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision of the Examining Division is set aside.
2. The case is remitted to the department of the first instance with the order to grant a patent with the text and drawings as specified below:
Description: pages 2 to 4, 14, 15, 18, 19 and 21 as originally filed; pages 5 to 7 filed with the letter dated 9. September 1992; pages 10, 12, 13, 16 and 17 filed with the letter dated 25. February 1993; and pages 8, 9, 11, 20, and 22 filed with the letter dated 12 September 1997; pages 1 and 23 filed with the letter dated 17 June 1998;
Claims: 6 to 11 filed with the letter dated 12. September 1997; and 1. to 5 filed with the letter dated 17. June 1998;
Drawings: Sheet 1/1 filed with the letter dated 18. January 1988