European Patent Office

T 0547/95 of 11.10.2000

European Case Law Identifier
ECLI:EP:BA:2000:T054795.20001011
Date of decision
11 October 2000
Case number
T 0547/95
Online on
22 November 2000
Petition for review of
-
Application number
89105425.6
IPC class
H01L 21/306
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
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Abstracts for this decision
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Application title
Method of manufacturing semiconductor device and apparatus for use in practicing the method
Applicant name
KABUSHIKI KAISHA TOSHIBA
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Inventive step (no) - ranges of parameters accessible through routine experimentation
Catchword
-
Cited cases
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Citing cases
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ORDER

For these reasons it is decided that:

The appeal is dismissed.