European Patent Office

T 0791/95 of 15.11.1999

European Case Law Identifier
ECLI:EP:BA:1999:T079195.19991115
Date of decision
15 November 1999
Case number
T 0791/95
Online on
6 December 1999
Petition for review of
-
Application number
90304044.2
IPC class
C23C 14/35
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Method and apparatus for sputter coating stepped wafers - case a
Applicant name
Tokyo Electron Limited
Opponent name
-
Board
3.4.01
Headnote
-
Keywords
Inventive step (yes)
Catchword
-
Cited cases
-
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the department of the first instance with the order to grant a patent on the basis of the following documents:

Claims: No. 1 to 27 as filed with the letter dated 21. September 1999;

Description: pages 7, 7a, 11, 11a as filed with the letter dated 21 September 1999;

pages 1, 14, 17, 18, 21, 26, 29 to 31, 33, 34, 40, 43, 46, 48, 49, 52, 55 and 58 as filed with the letter dated 10 February 1994;

pages 2 to 6, 8 to 10, 12, 13, 15, 16, 19, 20, 22 to 25, 27, 28, 32, 35 to 39, 41, 42, 44, 45, 47, 50, 51, 53, 54, 56, 57 59 and 60 as originally filed;

Drawings: Sheets 1/7 to 7/7 as originally filed.