T 0791/95 of 15.11.1999
- European Case Law Identifier
- ECLI:EP:BA:1999:T079195.19991115
- Date of decision
- 15 November 1999
- Case number
- T 0791/95
- Online on
- 6 December 1999
- Petition for review of
- -
- Application number
- 90304044.2
- IPC class
- C23C 14/35
- Language of proceedings
- English
- Distribution
- Distributed to board chairmen (C)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Method and apparatus for sputter coating stepped wafers - case a
- Applicant name
- Tokyo Electron Limited
- Opponent name
- -
- Board
- 3.4.01
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 56 1973
- Keywords
- Inventive step (yes)
- Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the department of the first instance with the order to grant a patent on the basis of the following documents:
Claims: No. 1 to 27 as filed with the letter dated 21. September 1999;
Description: pages 7, 7a, 11, 11a as filed with the letter dated 21 September 1999;
pages 1, 14, 17, 18, 21, 26, 29 to 31, 33, 34, 40, 43, 46, 48, 49, 52, 55 and 58 as filed with the letter dated 10 February 1994;
pages 2 to 6, 8 to 10, 12, 13, 15, 16, 19, 20, 22 to 25, 27, 28, 32, 35 to 39, 41, 42, 44, 45, 47, 50, 51, 53, 54, 56, 57 59 and 60 as originally filed;
Drawings: Sheets 1/7 to 7/7 as originally filed.