European Patent Office

T 0076/96 of 24.07.2001

European Case Law Identifier
ECLI:EP:BA:2001:T007696.20010724
Date of decision
24 July 2001
Case number
T 0076/96
Online on
1 August 2001
Petition for review of
-
Application number
91300566.6
IPC class
H01J 37/34
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
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Abstracts for this decision
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Application title
Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile
Applicant name
Varian Semiconductor Equipment Associates Inc.
Opponent name
-
Board
3.5.02
Headnote
-
Keywords
Clarity - (yes, after amendment)
Catchword
-
Cited cases
-
Citing cases
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ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the department of first instance for further prosecution.