T 0076/96 of 24.07.2001
- European Case Law Identifier
- ECLI:EP:BA:2001:T007696.20010724
- Date of decision
- 24 July 2001
- Case number
- T 0076/96
- Online on
- 1 August 2001
- Petition for review of
- -
- Application number
- 91300566.6
- IPC class
- H01J 37/34
- Language of proceedings
- English
- Distribution
- Distributed to board chairmen (C)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile
- Applicant name
- Varian Semiconductor Equipment Associates Inc.
- Opponent name
- -
- Board
- 3.5.02
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 84 1973
- Keywords
- Clarity - (yes, after amendment)
- Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the department of first instance for further prosecution.