European Patent Office

T 0659/96 (Chlorine trifluoride/SONY) of 01.08.2000

European Case Law Identifier
ECLI:EP:BA:2000:T065996.20000801
Date of decision
1 August 2000
Case number
T 0659/96
Online on
18 September 2000
Petition for review of
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Application number
90307877.2
IPC class
H01L 21/306
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
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Abstracts for this decision
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Application title
Dry etching methods
Applicant name
SONY CORPORATION
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Inventive step (no) - 'problem-solution' approach
Catchword
-
Cited cases
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Citing cases
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ORDER

For these reasons it is decided that:

The appeal is dismissed.