European Patent Office

T 0409/01 vom 26.06.2003

Europäischer Rechtsprechungsidentifikator
ECLI:EP:BA:2003:T040901.20030626
Datum der Entscheidung
26. Juni 2003
Aktenzeichen
T 0409/01
Online am
21. Juli 2003
Antrag auf Überprüfung von
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Anmeldenummer
94118479.8
IPC-Klasse
H01L 21/316
Verfahrenssprache
Englisch
Verteilung
An die Kammervorsitzenden verteilt (C)
Amtsblattfassungen
Keine AB-Links gefunden
Weitere Entscheidungen für diese Akte
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Zusammenfassungen für diese Entscheidung
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Bezeichnung der Anmeldung
A method of forming silicon oxy-nitride films by plasma- enhanced chemical vapor deposition
Name des Antragstellers
APPLIED MATERIALS, Inc.
Name des Einsprechenden
-
Kammer
3.4.03
Leitsatz
-
Schlagwörter
Inventive step (yes, after amendments)
Orientierungssatz
-
Zitierte Akten
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Zitierende Akten
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ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the first instance with the order to grant a patent on the basis of the following patent application documents:

Description:

Pages 1, 2, 8 and 9 as filed;

Pages 3, 3a, 4 to 7, 10 and 11 filed with the letter dated 11 May 1999;

Pages 12 and 13 annexed to the communication of the Board of 20 February 2003 and agreed by the appellant by the letter dated 17 April 2003;

Claims:

No. 1 annexed to the communication of the Board of 20 February 2003 and agreed by the appellant by the letter dated 17 April 2003;

Nos. 2 to 4 of the then first auxiliary request filed with the letter dated 5 October 2000;

Drawings:

Sheet 1/1 as filed.