T 0867/94 of 21.10.1998
- European Case Law Identifier
- ECLI:EP:BA:1998:T086794.19981021
- Date of decision
- 21 October 1998
- Case number
- T 0867/94
- Online on
- 21 October 1998
- Petition for review of
- -
- Application number
- 89312274.7
- IPC class
- H01L 21/3105
- Language of proceedings
- English
- Distribution
- Distributed to board chairmen (C)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Method for manufacturing a semiconductor device having a phospho silicate glass layer as an interlayer insulating layer
- Applicant name
- Kabushiki Kaisha Toshiba
- Opponent name
- -
- Board
- 3.4.01
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 123(2) 1973European Patent Convention Art 84 1973European Patent Convention Art 56 1973
- Keywords
- Main request: inventive step (yes)
- Catchword
- -
- Cited cases
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the department of the first instance with the order to grant a patent on the basis of the following documents according to the main request:
Claims:
No. 1 to 7, 8 (page 14) as filed with the letter of 20. October 1994, No. 8 (page 15) as filed with the letter of 16 July 1998,
Description:
Pages 1 to 3, 5, 7, 8 as originally filed, Page 4, 6, 9, 10 as filed with the letter of 16 July 1998,
Drawings:
Figures 1A, 1B, 1C, 1D, 1E, 1F as filed with the letter of 22 February 1990, Figures 2A, 2B, 2C, 2D, 2E, 3A, 3B, 4A, 4B, 5A, 5B, 5C, 6A, 6B, 6C as originally filed.