T 0183/04 of 03.03.2005
- European Case Law Identifier
- ECLI:EP:BA:2005:T018304.20050303
- Date of decision
- 3 March 2005
- Case number
- T 0183/04
- Petition for review of
- -
- Application number
- 97934054.4
- IPC class
- C23C 16/44
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Plasma Chamber with separate process gas and cleaning gas injection ports
- Applicant name
- LAM RESEARCH CORPORATION
- Opponent name
- -
- Board
- 3.2.07
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 111(1) 1973European Patent Convention Art 123(2) 1973European Patent Convention Art 84 1973
- Keywords
- Extension beyond content of application as filed (no, after amendment)
Claim - formulation to include all essential features (yes, after amendment)
Remittal to first instance for further prosecution - Catchword
- -
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the first instance for further prosecution on the basis of:
claim 1 as filed at the oral proceedings claims 2 to 8 and 9 (part) as filed on 22 January 2002 and claims 9 (part), and 10 to 13 as filed on 15 December 2000.