T 1352/13 of 06.03.2014
- European Case Law Identifier
- ECLI:EP:BA:2014:T135213.20140306
- Date of decision
- 6 March 2014
- Case number
- T 1352/13
- Petition for review of
- -
- Application number
- 07715034.0
- IPC class
- H01L 21/677H01L 21/687
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- SUBSTRATE TREATING DEVICE, SUBSTRATE CONVEY DEVICE, SUBSTRATE GRASPING DEVICE, AND CHEMICAL SOLUTION TREATING DEVICE
- Applicant name
- EBARA CORPORATION
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 111 1973European Patent Convention Art 111(1) 1973European Patent Convention Art 113(1) 1973European Patent Convention Art 123(2)European Patent Convention Art 54(1) 1973European Patent Convention Art 54(2) 1973European Patent Convention R 67 1973Rules of procedure of the Boards of Appeal Art 11
- Keywords
- Substantial procedural violation - opportunity to comment (no)
Remittal to the department of first instance - fundamental deficiency in first instance proceedings (yes)
Reimbursement of appeal fee - (yes) - Catchword
- -
- Cited cases
- J 0010/07
- Citing cases
- -
Order
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the first instance for further prosecution.
3. The appeal fee shall be reimbursed.