T 1352/13 of 06.03.2014
- European Case Law Identifier
- ECLI:EP:BA:2014:T135213.20140306
- Date of decision
- 6 March 2014
- Case number
- T 1352/13
- Online on
- 11 March 2014
- Petition for review of
- -
- Application number
- 07715034.0
- IPC class
- H01L 21/677H01L 21/687
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- SUBSTRATE TREATING DEVICE, SUBSTRATE CONVEY DEVICE, SUBSTRATE GRASPING DEVICE, AND CHEMICAL SOLUTION TREATING DEVICE
- Applicant name
- EBARA CORPORATION
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 123(2)European Patent Convention Art 54(1) 1973European Patent Convention Art 54(2) 1973European Patent Convention Art 113(1) 1973European Patent Convention R 67 1973Rules of procedure of the Boards of Appeal Art 11European Patent Convention Art 111(1) 1973European Patent Convention Art 111 1973
- Keywords
- Substantial procedural violation - opportunity to comment (no)
Remittal to the department of first instance - fundamental deficiency in first instance proceedings (yes)
Reimbursement of appeal fee - (yes) - Catchword
- -
- Cited cases
- J 0010/07
- Citing cases
- -
Order
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the first instance for further prosecution.
3. The appeal fee shall be reimbursed.