European Patent Office

T 1034/01 of 29.01.2004

European Case Law Identifier
ECLI:EP:BA:2004:T103401.20040129
Date of decision
29 January 2004
Case number
T 1034/01
Petition for review of
-
Application number
93119391.6
IPC class
H01J 37/32
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Process and electromagnetically coupled planar plasma apparatus for etching oxides
Applicant name
APPLIED MATERIALS, INC.
Opponent name
Institute of Technological Information, Inc.
Board
3.4.03
Headnote
-
Keywords
Abuse of procedure (no)
Lack of inventive step of one alternative of an independent claim renders the whole claim not allowable (cf. Reasons for
the Decision, item 6.6)
Inventive step (denied)
Catchword
-
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The patent is revoked.