T 0883/07 of 22.11.2007
- European Case Law Identifier
- ECLI:EP:BA:2007:T088307.20071122
- Date of decision
- 22 November 2007
- Case number
- T 0883/07
- Petition for review of
- -
- Application number
- 00926042.3
- IPC class
- H01L 21/66
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- Method and apparatus for run-to-run controlling of overlay registration
- Applicant name
- ADVANCED MICRO DEVICES, INC.
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 82 1973European Patent Convention R 67 1973
- Keywords
- Unity of invention
Reimbursement of appeal fee (yes) - Catchword
- -
- Cited cases
- G 0002/92
- Citing cases
- -
ORDER
For these reasons it is decided that:
1. The decision under appeal is set aside.
2. The case is remitted to the department of first instance for further prosecution.
3. The appeal fee is reimbursed.