European Patent Office

T 0883/07 of 22.11.2007

European Case Law Identifier
ECLI:EP:BA:2007:T088307.20071122
Date of decision
22 November 2007
Case number
T 0883/07
Petition for review of
-
Application number
00926042.3
IPC class
H01L 21/66
Language of proceedings
English
Distribution
No distribution (D)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Method and apparatus for run-to-run controlling of overlay registration
Applicant name
ADVANCED MICRO DEVICES, INC.
Opponent name
-
Board
3.4.03
Headnote
-
Keywords
Unity of invention
Reimbursement of appeal fee (yes)
Catchword
-
Cited cases
G 0002/92
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The case is remitted to the department of first instance for further prosecution.

3. The appeal fee is reimbursed.