T 2144/21 of 22.03.2022

European Case Law Identifier: ECLI:EP:BA:2022:T214421.20220322
Date of decision: 22 March 2022
Case number: T 2144/21
Petition for review of: -
Application number: 05826034.0
IPC class: G03F 1/00 G03F 1/32 G03C 5/00
Language of proceedings: English
Distribution: No distribution (D)
Download: Decision in English
OJ versions: No OJ links found
Other decisions for this case: -
Abstracts for this decision: -
Application title: TRI-TONE TRIM MASK FOR ALTERNATING PHASE-SHIFT PHOTOLITHOGRAPHY
Applicant name: Texas Instruments Incorporated
Opponent name: -
Board: 3.4.03
Headnote: -
Relevant legal provisions: European Patent Convention Art 108 European Patent Convention R 101(1)European Patent Convention R 99(2)
Keywords: Admissibility of appeal - missing statement of grounds
Catchword: -
Cited cases: T 1042/07
Citing cases: T 0120/22 T 2417/22

Order

For these reasons it is decided that:

The appeal is rejected as inadmissible.