T 2287/10 of 24.11.2015
- European Case Law Identifier
- ECLI:EP:BA:2015:T228710.20151124
- Date of decision
- 24 November 2015
- Case number
- T 2287/10
- Petition for review of
- -
- Application number
- 01935277.2
- IPC class
- H01L 21/66
- Language of proceedings
- English
- Distribution
- No distribution (D)
- Download
- Decision in English
- OJ versions
- No OJ links found
- Other decisions for this case
- -
- Abstracts for this decision
- -
- Application title
- METHOD AND APPARATUS FOR USING SCATTEROMETRY TO PERFORM FEEDBACK AND FEED-FORWARD CONTROL
- Applicant name
- ADVANCED MICRO DEVICES, INC.
- Opponent name
- -
- Board
- 3.4.03
- Headnote
- -
- Relevant legal provisions
- European Patent Convention Art 123(2)
- Keywords
- Amendments - intermediate generalisation
Amendments - added subject-matter (yes)
Amendments - all requests - Catchword
- -
- Cited cases
- G 0002/10
- Citing cases
- -
Order
For these reasons it is decided that:
The appeal is dismissed.