European Patent Office

T 0710/99 of 11.02.2003

European Case Law Identifier
ECLI:EP:BA:2003:T071099.20030211
Date of decision
11 February 2003
Case number
T 0710/99
Petition for review of
-
Application number
90109477.1
IPC class
H01L 21/00
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
-
Abstracts for this decision
-
Application title
Multiple chamber staged-vacuum semiconductor wafer processing system
Applicant name
APPLIED MATERIALS
Opponent name
Institute of Technological Information, Inc.
Board
3.4.03
Headnote
-
Keywords
New requests filed during the oral proceedings before the Board - admitted (see point 2.4 of the "Reasons for the Decision")
Catchword
-
Citing cases
-

ORDER

For these reasons it is decided that:

1. The decision under appeal is set aside.

2. The patent is revoked