European Patent Office

T 0389/94 (Dry etching method/KABUSHIKI KAISHA TOSHIBA) of 27.11.1998

European Case Law Identifier
ECLI:EP:BA:1998:T038994.19981127
Date of decision
27 November 1998
Case number
T 0389/94
Petition for review of
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Application number
88105176.7
IPC class
H01L 21/306
Language of proceedings
English
Distribution
Distributed to board chairmen (C)
OJ versions
No OJ links found
Other decisions for this case
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Abstracts for this decision
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Application title
Dry etching method
Applicant name
KABUSHIKI KAISHA TOSHIBA
Opponent name
-
Board
3.4.01
Headnote
-
Keywords
Prior art documents introduced ex-officio by the Board
Claims substantially amended in the appeal procedure
Remittal of the case to the examining division for further prosecution
Catchword
-
Citing cases
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ORDER

For these reasons it is decided that:

The case is remitted to the examining division for further prosecution in relation to the proposed amended claims filed on 24 September 1998.